1.Plasma-assisted precision machining of wide band gap semiconductors

      In this research project, we use plasma to process wide band gap semiconductor materials, such as silicon carbide, gallium nitride, diamond, etc. These materials are very difficult to process due to their high strength and chemical inertness. With the aid of plasma, these materials can be processed efficiently and precisely without surface damage. This project will also study polishing, thinning, and printing patterns.

2. Manufacture of micro plasma chips for biomedical applications

       The microfluidic chip is a small platform that integrates biological science, chemical synthesis, environmental monitoring, and sample preparation, reaction, separation, and detection in the micron-scale chip. The system typically uses channels with dimensions of tens to hundreds of microns to process or manipulate small volumes (10-9 to 10-18 liters) of fluid.The aim of this project is to manufacture plasma microchips for biomedical applications, especially the integration of cancer cell selection and visualization of the reaction between cancer cells and appropriate plasma volume. Figure 1 shows the schematic of the integrated system. First collect blood samples, and then mix blood cells with magnetic beads coated with certain antibodies. Second, after thorough mixing, the cancer cells were captured by the beard. Third, the captured cancer cells flow through the plasma generation area, and a microscope or other observation device is used to monitor the reaction process between plasma and cancer cells. Finally, in the detection part, the magnetic field is uploaded and the captured cancer cells are classified for research. Figure 2 shows the microplasma we obtained in the microchannel.


3. Plasma biomedical applications

        The plasma contains ultraviolet (UV), charged particles (electrons, positive ions and negative ions, etc.), excited and metastable particles, and some chemically active particles. These components can be used for sterilization, cancer treatment, and surface modification of biological materials. In this project, it is planned to apply plasma to biomedicine.


4. Electrochemical polishing of metals

        Tungsten alloy is a promising material that can be used as a glass mold. It has an ultra-high melting point, excellent oxidation resistance at high temperatures, and a low coefficient of thermal expansion. Electrochemical polishing (ECP) has been used to polish tungsten to obtain damage-free and ultra-smooth surfaces. ECP is a non-contact polishing process based on etching. In addition to tungsten, other metals such as aluminum, stainless steel, titanium, etc. can also be polished in this way.


5. Electrochemical etching enhanced GaN mechanical polishing

        GaN is a kind of material with high hardness and chemical stability, so the traditional polishing method cannot be applied to the polishing of GaN. In this project, we use electrochemical etching to achieve high material removal rates and fine abrasives to achieve ultra-smooth surfaces. This project involves 3D printing for polishing, electrochemical etching and polishing stone manufacturing.


6. Electrochemical micromachining

        The project consists of two parts: micro / nano electrode manufacturing and electrode manufacturing applications. We are using electrochemical technology to manufacture tungsten electrodes with a diameter of less than 50 nm from a raw rod with a diameter of 1 mm. The manufactured electrodes can be used in various fields such as patterning, micro-etching, micro-sensing, etc.


7. Electrochemical painting of titanium

        As a class of advanced multifunctional materials, biomedical materials can be used to diagnose, treat, repair or replace human tissues, organs or enhance their functions. Its unique efficacy cannot be replaced by drugs. The development of new biomaterials is expensive and time-consuming. This is a more cost-effective way to modify existing traditional biomaterials. Plasma-based technology is a cost-effective plasma surface modification technology. Improve surface characteristics (about a few hundred nanometers) without affecting the performance of the substrate. In the past 20 years, due to its controllability and versatility, plasma technology has received more and more attention in the field of medical implant modification. It can give the surface or injection layer an effective coating.


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